ࡱ> npm RYbjbjSS2p11A\\\\\ppp8Dp,TTT,,,,,,,$/d2hC,E\TTTTTC,\\T,ZZZTN\\,ZT,ZZr(T)() ,,0,%)z2f\4))"2l84$\)HTTZTTTTTC,C,LTTT,TTTT\4TTTTTTTTT, ": Ym_l'Yf[xvzu zYef['Y~N0W,g`Q zS2413006_b |*zz*)Yf[b_f[g yf[g-Ne zTy~s|_d\O:ghVNb/gc-N0ee zTyRobotics for Handling on the NanoscaleNYe^1sgalLyoRxvzXT]\OS0008712E-mailhqwang@zju.edu.cnT|5u݋87952052NYe^2Sergej FatikowLyYec]\OSE-mailfatikow@uni-oldenburg.deT|5u݋Kb:g +49-441798-4291Q;`f[epeSvQRM1f[R16f[e 32f[32[vQNf[Rpe28he_s^e8h30 fNbJT70%N0 zQ[-Ne{NN\N300W[ ,g zYef[Q[R:N NR ,{NRN~~s|_d\Ob/g HQ{USN~_:ghVNT~s|_d\Ob/gi_ 6qTN~kbc5u\Tkbcc>f_\b/g gTN~kbcc>f_\Tkbc5u\Ɩbb/g,{NRN~~s|_d\O:ghVNb/g HQN~~s||^MOyqRhVS|~0)R(ukbcc>f_\\O:Nd\OKbv~s|_d\O:ghVN|~0~s|_d\O:ghVNb/gb4NvcbS~s|:\^irSOcRTS qb/g 6qTN~~s|_d\O:ghVN@bO(uvVPYtb/g0~s|:\^[evhߍ*b/g0 N~VP͑gb/gSRSb/g gTN~~s|_d\O:ghVNꁨRc6R|~0,{ NRN~N$N*N[O Sb)R(u~s|_d\O:ghVNd\OTh_x~s|{T~s|~ S)R(u~s|_d\O:ghVNd\OTh_uir~ހI{uirPge0 N0 zQ[Ye{NThis course covers the fundamental robot technologies for Handling on the Nanoscale. The first part: Introduction to microrobotics and nanohandling, Scanning Electron Microscopy (SEM), Scanning Probe Microscopy (SPM), Combination of SPM and SEM approaches. The second part: Nanopositioning actuators and systems, Development of nanohandling robots, SPM as a nanohandling robot, Nanohandling technologies and challenges of the automation, Nanoassembly and bonding on the nanoscale, Image processing for robot-based nanohandling, Real-time object tracking on the nanoscale, Three-dimensional vision feedback on the nanoscale, Force feedback on the nanoscale, Positioning control of microrobots (low-lewel control system), Control of a nanohandling robot cell (high-level control system). The third part: Handling and characterization of carbon nanotubes and nanowires, Handling and characterization of biological materials.V0YwƋbHQO zBlYwƋ_5uP[b/g0 OahVb/g05uI{W@xwƋN0Yef[vvNBlN\N200W[ @w_5uP[b/gvSU\ _s|b/gpTNgP ~s|5uP[f[T~:g5ub/g^Џ u ~s|_d\Ob/g(WStTelI{eb_0RN]'YSU\ /fsN~s|ybv͑/edb/g0,g zbǏ[~s|_d\O0h_b/gS~s|d\O_:ghVNb/gvc Of[ucc~s|ybvW@xwƋ q`~s|_d\Ovel :NۏNekNNyxT[E]\OSb}YW@x0Ǐ,g zf[`N f[u^勌cckbc5u\0kbcc>f_\I{~s|_d\Ob/g S~s|_d\O:ghVN|~0mQ0YePgbINYePgAutomated Nanohandling by Microrobots, Sergej Fatikow editor, 2008 by Springer, ISBN 978-1-84268-977-4N0SfNvkQ0Yef[eScQ[~N~h [0QQvb;N hT!kYef[Q[SbXc0[00ՋI{ Yl1Nanohandling Technology: Introduction ,6DFT`npt & . 6 B H P d p * , > \ ϮϮ箞痏 h?Ho( he o( ho(he hw.o( he he h%'hEB*aJo(ph hEo(h.B*QJaJo(phhEB*QJaJo(ph h%'o( h+0o( hw.\o( hS\o( hw.o(hw.5CJo(hw.5CJaJo(2,6FTblv$If $$Ifa$d@&$da$ vx6-'-$If $$Ifa$kd$$Ifl3ֈ, y`%LLMMMM t0%644 la   SJJ $$Ifa$kd$$Ifl43\`%LMM t0%644 laf4$If  ( . 8 B R YPJP>PJ $IfWD`$If $$Ifa$kd6$$Ifl43\`%LMM t0%644 laf4R T d 6--- $$Ifa$kd$$Ifl3ֈ, y`%LLMMMM t0%644 la VMMAM $IfWD` $$Ifa$kdl$$Ifl3\`%LMM t0%644 la$If , 0' $$Ifa$kd$$Ifl3ֈ, y`%LLMMMM t0%644 la$If, > ^ ` MA $$Ifa$gdgkd$$Ifl3\`%L t0%644 la$If $$Ifa$ *kd:$$Ifl4Yֈ, y`%LLMMMM t0%644 laf4 $$Ifa$ $$Ifa$$If 3*$*$If $$Ifa$kd$$Ifl4Yֈ, y`%LLMMMM t0%644 laf4 *kdr$$Ifl4Yֈ, y`%LLMMMM t0%644 laf4 $$Ifa$ $If $$Ifa$ 3*$*$If $$Ifa$kd$$Ifl4Yֈ, y`%LLMMMM t0%644 laf4 *kd$$Ifl4Yֈ, y`%LLMMMM t0%644 laf4 $$Ifa$  H A5 $d$Ifa$kdF$$Ifl3\, y`%LLM t0%644 la$If $$Ifa$gd $$Ifa$         H V r t ~  ` b p v x "^`Ӿߵ{hlJhw.OJQJaJo( hso( h>:o( hfo( h.o( ha!o( hJo(hw.5CJo( hw.o(h+ hw.aJhe \aJo(h+ h(QJ\aJh+ hjxQJ\aJh+ hjx\aJh+ h\aJh+ hQJ\aJ/H tcR$G$IfWD`gd8z$G$IfWD`gd:Pzkd$$Ifl0`%L t0%644 la$G$IfWD`gdv  =?MO}!"EGbc$%XYy{ KM *6FP¹h{UkOJQJaJo(hFOJQJaJo(hBAhBAOJQJaJo(hBAOJQJaJo(hw.5CJo( hw.o(hsZh-To( hUhU hsZo(hUB*aJo(ph hUo(hsZ h:PhsZh:Phw.o(5 RTVyhhh__ d$If$G$IfWD`gdBA $d$Ifa$zkdg$$IflF 0`%L t0%644 laPRTVX~.0HJ*|qfZNh:[h:[OJPJo(h{Ukhw.OJPJo(hjOJQJaJo(hOJQJaJo(h{Ukh{UkOJQJaJ h.o(h{Ukh{UkOJQJaJo('h:[h:[OJPJQJaJnHo(tH!h:[OJPJQJaJnHo(tH!h@yOJPJQJaJnHo(tHhw.5CJo( hw.o(h:[h:[PJo(hw.PJo(hBAhw.OJQJaJo(VX~yhhhWLL dh<$If$G$IfWD`gd{Uk$G$IfWD`gd( $d$Ifa$zkd$$Ifl0`%L t0%644 la*,.0ypppZKK$d$Ifa$gdeYEd,$IfWD^`Egdvm d$If $d$Ifa$zkdu $$Ifl 0`%L t0%644 la*,.06   "$&ۭgWJ7%h-TB*PJ\aJnHo(phtHh-TB*\aJo(phhvmh-TB*\aJo(ph?h:[h:[>*B*CJKHOJPJQJ^JaJnHo(phtH9h?<>*B*CJKHOJPJQJ^JaJnHo(phtHhw.5CJo( hw.o(hhw.PJnHo(tH heYhvmB*KHaJo(ph ho( hvmo(h:[h:[PJnHo(tHh:[PJnHo(tHhw.PJnHo(tH   "$&(*vjaaaaaaa d,$If $d$Ifa$zkd $$Ifl0`%L t0%644 la$d$Ifa$gdeY &(*,.:P:PQ QQQQQQQQQQQQQHR S SSSSSSɻɳɻɪwɻɳog_Z hQeuo(h|h=Po(h|hQeuo(h^hmo(h{ mhg,aJo(h h:o(h^hAXo(hw.CJo(h h#>o(h^h CJo( h!Q_h^Uh!Q_h^5 h9o(hw.5CJo( hw.o(h?<h-To(+h:[h:[B*PJ\aJnHo(phtH%h:[B*PJ\aJnHo(phtH!*,.tz|vjjj $dh$Ifa$d@&zkd $$Ifl, 0`%L t0%644 la d,$If:PP QocRAA$G$IfWD`gd!Q_$G$IfWD`gd!Q_ $dh$Ifa$kd $$IflwF]$F t0%6    44 laand Technological ConditionsLect. 1-2: Introduction to microrobotics and nanohandlingLect. 3-4: Scanning Electron Microscopy (SEM)Xc2Lect. 5-6: Scanning Probe Microscopy (SPM)Lect. 7-8: Combination of SPM and SEM approachesXc3Nanohandling Robot Cell: Components and ApproachesLect. 9-10: Nanopositioning actuators and systemsLect. 11-12: Development of nanohandling robotsXc4Lect. 13-14: SPM as a nanohandling robotLect. 15-16: Nanohandling technologies and challenges of the automationXc5Lect. 17-18: Nanoassembly and bonding on the nanoscaleSensor Feedback for Automated NanohandlingLect. 19-20: Image processing for robot-based nanohandlingXc6Lect. 21-22: Real-time object tracking on the nanoscaleLect. 23-24: Three-dimensional vision feedback on the nanoscaleXc7Lect. 25-26: Force feedback on the nanoscaleReal-Time Control of Robot-Based NanohandlingLect. 27-28: Positioning control of microrobots (low-lewel control system)Xc8Lect. 29-30: Control of a nanohandling robot cell (high-level control system)Crucial Applications of NanohandlingLect. 31-32: Handling and characterization of carbon nanotubes, nanowires and biological materialsXc]N0YlPAGE  QQQQpQQQ`TCCT$G$IfWD`gd!Q_ $dh$Ifa$kd $$IflF]$F t0%6    44 la$dh$Ifa$gd QQQHRR SocRAA$G$IfWD`gd!Q_$G$IfWD`gd!Q_ $dh$Ifa$kd> $$IflF]$F t0%6    44 la SSSSnSSaUD0dh$G$IfWD`gd!Q_$G$IfWD`gd!Q_ $dh$Ifa$kd $$IflF]$F t0%6    44 la$$1$Ifa$gdQeuSSTTT|TTFUHUPURUXUFVHVPVRVXVVWWWWWWPXXYY.Y6Y^Y`YhYjYlYxYzY~YYYYYYYYYYY۵ۭۭۥ睔~x~x h0Jjh0JUh%{jh%{Uhw.5CJo(h=PhQeuo(h!Q_h,o(h!Q_h^o(h^hPLCJ\o(h hQeuaJo(h^hBo(h!Q_h^5 h!Q_h^ hQeuo(h|hQeuo(h|h=Po(h^h ]o(/ST TT|TTaUD3$G$IfWD`gd!Q_$G$IfWD`gd!Q_ $dh$Ifa$kdr$$IflF]$F t0%6    44 la$$1$Ifa$gd|THURUTUXUUHVRVPD $dh$Ifa$kd $$IflF]$F t0%6    44 la$$1$Ifa$gd|$G$IfWD`gd!Q_RVTVXVVWWocRAR$G$IfWD`gd!Q_$G$IfWD`gd!Q_ $dh$Ifa$kd$$IflF]$F t0%6    44 laWWWWPXXaUD3$G$IfWD`gd!Q_$G$IfWD`gd!Q_ $dh$Ifa$kd@$$IflF]$F t0%6    44 la$$1$Ifa$gd|X`YjYlYnYxY|Y~YYPJJHHHd@&kd$$IflF]$F t0%6    44 la$$1$Ifa$gd|$G$IfWD`gd!Q_YYYYYYYYYYYYYYd@&h]h&`#$YYYYYYhw.5CJo(h%{h0Jo(h0182P. 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